Roschuk, T.; Zalloum, O. H. Y.; Wojcik, J.; Zhang, H.; Mascher, P.
(2007)
Si nanoclusters embedded in two different dielectric matrices,
silicon oxide and silicon nitride, have been formed through
annealing of Si-rich silicon oxide (SRSO) and Si-rich silicon
nitride (SRSN) thin films. The ...