Heng, C. L.; Zalloum, O. H. Y.; Wojcik, J.; Roschuk, T.; Mascherb, P.
(JOURNAL OF APPLIED PHYSICS, 2008-01-25)
We have studied photoluminescence (PL) from an Er-doped Si-rich Si oxide (SRSO) film thermally annealed under different conditions. Compared to the case of annealing in N2 alone, double-step annealing the film at 875°C in ...