Comedi, D.; Zalloum, O. H. Y.; Irving, E. A.; Wojcik, J.; Roschuk, T.; Flynn, M. J.; Mascher, P.
(2006-01-25)
The formation and subsequent growth of crystalline silicon nanoclusters (Si-ncs) in annealed silicon-rich silicon oxides (SRSOs) were studied by glancing angle x-ray diffraction. SRSO samples with Si concentrations (𝑦) ...