Li, J.; Zalloum, O. H. Y.; Roschuk, T.; Heng, C. L.; Wojcik, J.; Mascher, P.
(Hindawi Publishing Corporation, 2008-03-27)
Rare earth (Tb or Ce)-doped silicon oxides were deposited by electron cyclotron resonance plasma-enhanced chemical vapour
deposition (ECR-PECVD). Silicon nanocrystals (Si-ncs) were formed in the silicon-rich films during ...