Pi, X. D.; Zalloum, O. H. Y.; Roschuk, T.; Wojcik, J.; Knights, A. P.; Mascher, P.
(2006-03-08)
Photoluminescence (PL) from amorphous Si nanoclusters (Si-ncls) formed by thin-film deposition via electron-cyclotron resonance plasma-enhanced chemical vapor deposition followed by annealing at temperatures ⩽875°C has ...