Wilson, Patrick RJ; Roschuk, Tyler; Dunn, Kayne; Normand, Elise N; Chelomentsev, Evgueni; Zalloum, Othman HY; Wojcik, Jacek; Mascher, Peter
(2011-02-23)
Silicon nanoclusters (Si-ncs) embedded in silicon nitride films have been studied to determine the effects that deposition and processing parameters have on their growth, luminescent properties, and electronic structure. ...