Heng, C. L.; Chelomentsev, E.; Zalloum, O. H. Y.; Wojcik, J.; Mascherb, P.
(2008-12-30)
The authors have studied photoluminescence PL from Er-doped Si-rich Si oxide SRSO films
deposited by magnetron sputtering of an Er+Si+SiO2 composite target in Ar or Ar+H2 ambients.
When the samples were annealed in N2, ...